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Precise angle measurement technique for a vertical microstructure on substrate

Author(s):
Publication title:
Machine Vision Applications in Industrial Inspection IX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4301
Pub. Year:
2001
Page(from):
134
Page(to):
143
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439796 [0819439797]
Language:
English
Call no.:
P63600/4301
Type:
Conference Proceedings

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