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Advanced excimer laser crystallization techniques of Si thin film for location control of large grain on glass

Author(s):
Ishihara,R. ( Delft Univ. of Technology )
Wilt,P.Ch.van der
Dijk,B.D.van
Burtsev,A.
Voogt,F.C.
Bertens,G.J.
Metselaar,J.W.
Beenakker,C.I.M.
3 more
Publication title:
Flat panel display technology and display metrology II : 22-23 January 2001, San Jose, [California] USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4295
Pub. Year:
2001
Page(from):
14
Page(to):
23
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439734 [0819439738]
Language:
English
Call no.:
P63600/4295
Type:
Conference Proceedings

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