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Temperture-gradient and composition-spread deposition of epitaxial oxide films and high-throughput characterization

Author(s):
Fukumura,T. ( Tokyo Institute of Technology )
Ohtani,M.
Nishimura,J.
Kageyama,T.
Koida,T.
Lippmaa,M.
Kawasaki,M.
Hasegawa,T.
Koinuma,H.
4 more
Publication title:
Combinatorial and composition spread techniques in materials and device development II : 22-23, 25 January, 2001, San Jose, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4281
Pub. date:
2001
Vol.:
4281
Page(from):
17
Page(to):
26
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439598 [0819439592]
Language:
English
Call no.:
P63600/4281
Type:
Conference Proceedings

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