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Combinatorial methodology for optimizing oxide/semiconductor interface with atomic interfacial layers

Author(s):
Chikyow,T. ( National Institute for Research in Inorganic Materials )
Ahmet,P.
Nakajima,K.
Koida,T.
Takakura,M.
Yoshimoto,M.
Koinuma,H.
2 more
Publication title:
Combinatorial and composition spread techniques in materials and device development II : 22-23, 25 January, 2001, San Jose, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4281
Pub. Year:
2001
Page(from):
1
Page(to):
16
Pages:
16
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439598 [0819439592]
Language:
English
Call no.:
P63600/4281
Type:
Conference Proceedings

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