High-resolution IC inspection technique

High-resolution IC inspection technique

Author(s):

Publication title:

Metrology-based Control for Micro-Manufacturing

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4275

Pub. Year:

2001

Page(from):

126

Page(to):

137

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819439536 [0819439533]

Language:

English

Call no.:

P63600/4275

Type:

Conference Proceedings

Details

TDL ID:	ZA00011991
Series ID:	PA00000029
Conf. info. (Name):	SPIE LASE : Metrology-based control for micro-manufacturing
Conf. info. (Number):	2001
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2001.01.24-2001.01.25

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