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Advanced defect-detection methods for CMP process modules in semiconductor manufacturing

Author(s):
Steckenrider,J.S. ( Cabot Microelectronics Corp. )
Foster,R.
Guha,S.
Ra,Y.
Kim,H.
Sethuraman,A.
1 more
Publication title:
Metrology-based Control for Micro-Manufacturing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4275
Pub. Year:
2001
Page(from):
107
Page(to):
118
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439536 [0819439533]
Language:
English
Call no.:
P63600/4275
Type:
Conference Proceedings

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