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Propagation of short-pulsed laser radiation and stages of ablative deep-channel formation

Author(s):
Kononenko,T.V. ( General Physics Institute )
Klimentov,S.M.
Konov,V.I.
Pivovarov,P.A.
Garnov,S.V.
Dausinger,F.
Breitling,D.
2 more
Publication title:
Laser Applications in Microelectronic and Optoelectronic Manufacturing VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4274
Pub. Year:
2001
Page(from):
248
Page(to):
257
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439529 [0819439525]
Language:
English
Call no.:
P63600/4274
Type:
Conference Proceedings

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