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Diamond-based deep-UV sensors for lithography applications

Author(s):
Whitfield,M.D. ( Exitech Ltd. )
Lansley,S.P.
Gaudin,O.
McKeag,R.D.
Rizvi,N.H.
Jackman,R.B.
1 more
Publication title:
Laser Applications in Microelectronic and Optoelectronic Manufacturing VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4274
Pub. date:
2001
Vol.:
4274
Page(from):
40
Page(to):
47
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439529 [0819439525]
Language:
English
Call no.:
P63600/4274
Type:
Conference Proceedings

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