Packaging and integration of MEMS and related microsystems for system-on-a-package (SOP)

Packaging and integration of MEMS and related microsystems for system-on-a-package (SOP)

Author(s):

Publication title:

Smart structures and devices : 13-15 December 2000, Melbourne, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4235

Pub. Year:

2000

Page(from):

198

Page(to):

208

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819439093 [0819439096]

Language:

English

Call no.:

P63600/4235

Type:

Conference Proceedings

Details

TDL ID:	ZA00011953
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Smart Structures and Devices
Conf. info. (Number):	2000
Conf. info. (Venue):	Melbourne, Australia
Conf. info. (Date):	2000.12.13-2000.12.15

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