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"Ferroelectric Pb(Zr0.53, Ti0.47)O3 thin films for smart MEMS"

Author(s):
Publication title:
Smart structures and devices : 13-15 December 2000, Melbourne, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4235
Pub. date:
2000
Vol.:
4235
Page(from):
40
Page(to):
47
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439093 [0819439096]
Language:
English
Call no.:
P63600/4235
Type:
Conference Proceedings

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