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Practical heterodyne surface profiling interferometer with automatic focusing

Author(s):
Publication title:
Advanced optical manufacturing and testing technology : 1-3 November 2000, Chengdu, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4231
Pub. Year:
2000
Page(from):
301
Page(to):
306
Pages:
6
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439048 [0819439045]
Language:
English
Call no.:
P63600/4231
Type:
Conference Proceedings

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