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Process monitoring of LPCVD silicon nitride and polysilicon by variable-angle spectroscopic ellipsometry

Author(s):
Publication title:
Micromachining and Microfabrication
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4230
Pub. Year:
2000
Page(from):
231
Page(to):
240
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439024 [0819439029]
Language:
English
Call no.:
P63600/4230
Type:
Conference Proceedings

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