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Reactive ion etching of CVD diamond films for MEMS applications

Author(s):
Ding,G.-F.
Zhao,X.-L.
Yu,A.
Yang,C.-S.
Cai,B.
Yao,X.
1 more
Publication title:
Micromachining and Microfabrication
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4230
Pub. Year:
2000
Page(from):
224
Page(to):
230
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439024 [0819439029]
Language:
English
Call no.:
P63600/4230
Type:
Conference Proceedings

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