Microfabrication technology for high-speed Si-based systems
- Author(s):
Ishii,H. Yagi,S. Saito,K. Hirata,A. Kudo,K. Yano,M. Nagatsuma,T. Machida,K. Kyuragi,H. - Publication title:
- Micromachining and Microfabrication
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4230
- Pub. Year:
- 2000
- Page(from):
- 43
- Page(to):
- 52
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439024 [0819439029]
- Language:
- English
- Call no.:
- P63600/4230
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Gold damascene interconnect technology for millimeter-wave photonics on silicon
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
2
Conference Proceedings
Method for testing electrostatic discharge tolerance for fingerprint sensor LSI
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Lens-cementing technology used in optical system of DUV wavelength region: selection of optical cement and degradation evaluation by DUV irradiation [6152-149]
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
High-speed and high-output-power unitraveling-carrier photodiodes (Invited Paper)
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Pattern-data preparation method to enchance high-throughput mask fabrication in variable-shaped e-beam writing system
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
A Fiber-Optic Fluorometric Immunoassay for Determination of Dermatophagoides Farinae Allergen (Der f1)
Electrochemical Society |
10
Conference Proceedings
Uni-traveling-carrier photodiodes for high-speed detection and broadband sensing
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |