Design considerations in micromachined silicon microphones
- Author(s):
Miao,J. Lin,R. Chen,L. Zou,Q. Lim,S.Y. Seah,S.H. - Publication title:
- Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4228
- Pub. Year:
- 2000
- Page(from):
- 309
- Page(to):
- 314
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439000 [0819439002]
- Language:
- English
- Call no.:
- P63600/4228
- Type:
- Conference Proceedings
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