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Steep retrograde indium channel profiling for high-performance nMOSFETs device fabrication

Author(s):
Ong,S.Y.
Chor,E.F.
Leung,Y.K.
Lee,J.
Li,W.S.
See,A.
Chan,L.H.
2 more
Publication title:
Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4228
Pub. Year:
2000
Page(from):
270
Page(to):
278
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819439000 [0819439002]
Language:
English
Call no.:
P63600/4228
Type:
Conference Proceedings

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