CAD modeling of scratch drive actuation
- Author(s):
- Publication title:
- Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4228
- Pub. Year:
- 2000
- Page(from):
- 83
- Page(to):
- 89
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439000 [0819439002]
- Language:
- English
- Call no.:
- P63600/4228
- Type:
- Conference Proceedings
Similar Items:
American Society of Mechanical Engineers |
American Chemical Society |
2
Conference Proceedings
Numerical simulation of microassembly of MEMS devices and post-assembly electromechanical actuation
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Comparison of theoretical and experimental determination of the flexing of scratch drive actuator plates
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Detailed study of scratch drive actuator characteristics using high-speed imaging
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Integration of active materials with silicon micromachining: applications to optical MEMS (Invited Paper)
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Design of a pigtailed tunable filter for optical fiber transmissions at 1.3 to 1.55ヲフm
SPIE - The International Society for Optical Engineering |
American Society of Mechanical Engineers |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Organic light-emitting device as a fluorescence spectroscopy light source: one step toward the lab-on-a-chip device
SPIE-The International Society for Optical Engineering |