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Optical emission diagnostics of glow discharge plasma for the carbon nitride growth process

Author(s):
Publication title:
Optical measurement and nondestructive testing : Techniques and applications, 8-10 November 2000, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4221
Pub. Year:
2000
Page(from):
348
Page(to):
351
Pages:
4
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438928 [0819438928]
Language:
English
Call no.:
P63600/4221
Type:
Conference Proceedings

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