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Carrier Lifetime Control and Characterization of High-Resistivity Silicon Used for High-Power Devices

Author(s):
Schulze,H.-J.
Frohnmeyer,A.
Niedernostheide,F.-J.
Hille,F.
Tutto,P.
Pavelka,T.
Wachutka,G.
2 more
Publication title:
High Purity Silicon VI : proceedings of the sixth International Symposium
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4218
Pub. date:
2000
Vol.:
4218
Page(from):
414
Page(to):
424
Pages:
11
Pub. info.:
Pennington, N.J. — Bellingham, Wash.: Electrochemical Society — SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9781566772846 [1566772842]
Language:
English
Call no.:
P63600/4218
Type:
Conference Proceedings

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