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Bulk and Surface Properties of Cz Silicon After Hydrogen Plasma Treatments

Author(s):
Job,R.
Ulyashin,A.G.
Fahrner,W.R.
Markevich,V.P.
Murin,L.I.
Lindstrom,J.L.
Raiko,V.
Engemann,J.
3 more
Publication title:
High Purity Silicon VI : proceedings of the sixth International Symposium
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4218
Pub. date:
2000
Vol.:
4218
Page(from):
209
Page(to):
220
Pages:
12
Pub. info.:
Pennington, N.J. — Bellingham, Wash.: Electrochemical Society — SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9781566772846 [1566772842]
Language:
English
Call no.:
P63600/4218
Type:
Conference Proceedings

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