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Novel precision mechanical design for ellipsometer

Author(s):
Publication title:
Optomechatronic systems : 5-6 November 2000, Boston, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4190
Pub. Year:
2000
Page(from):
141
Page(to):
148
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438553 [0819438553]
Language:
English
Call no.:
P63600/4190
Type:
Conference Proceedings

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