Blank Cover Image

Mask manufacturing contribution on 248-nm and 193-nm lithography performances

Author(s):
Publication title:
20th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4186
Pub. date:
2000
Vol.:
4186
Page(from):
902
Page(to):
910
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438492 [0819438499]
Language:
English
Call no.:
P63600/4186
Type:
Conference Proceedings

Similar Items:

Barberet,A., Fanget,G.L., Richoilley,J.-C., Tissier,M., Quere,Y.

SPIE-The International Society for Optical Engineering

Sooriyakumaran,R., Wallraff,G.M., Larson,C.E., Fenzel-Alexander,D., DiPietro,R.A., Opitz,J., Hofer,D.C., …

SPIE-The International Society for Optical Engineering

Barberet, A., Buck, P.D., Fanget, G.L., Toublan, O., Richoilley, J.-C., Tissier, M.

SPIE-The International Society for Optical Engineering

Cheng, C.C., Su, T.-L., Tsai, F.-G., Tsai, T.-H., Tu, C.-C., Yoo, C.-S.

SPIE - The International Society of Optical Engineering

Barberet,A., Galan,G., Fanget,G.L., Richoilley,J.-C., Tissier,M., Quere,Y.

SPIE-The International Society for Optical Engineering

Petersen,J.S., Socha,R.J., Naderi,A.R., Baker,C.A., Rizvi,S.A., BanDenBroeke,D., Kachwala,N., Chen,F., Laiding,S., …

SPIE-The International Society for Optical Engineering

Barberet,A., Fanget,G.L., Buck,P.D., Toublan,O., Richoilley,J.-C., Tissier,M.

SPIE-The International Society for Optical Engineering

Kling,M.E., Cave,N., Falch,B.J., Fu,C.-C., Green,K.G., Lucas,K.D., Roman,B.J., Reich,A.J., Sturtevant,J.L., Tian,R., …

SPIE - The International Society for Optical Engineering

Pain,L., Trouiller,Y., Barberet,A., Guirimand,O., Fanget,G.L., Martin,N., Quere,Y., Nier,M.E., Lajoinie,E., Louis,D., …

SPIE - The International Society for Optical Engineering

Opitz,J., Allen,R.D., Wallow,T.I., Wallraff,G.M., Hofer,D.C.

SPIE-The International Society for Optical Engineering

Trouiller,Y., Fanget,G.L., Miramond,C., Rody,Y.F.

SPIE-The International Society for Optical Engineering

M. L. Ling, G. S. Chua, C. J. Tay, C. Quan, Q. Lin

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12