Establishment of production process and assurance method for alternating phase-shift masks
- Author(s):
Murai,S.M. Koizumi,Y. Kamibayashi,T. Saitou,H. Hoga,M. Morikawa,Y. Miyashita,H. - Publication title:
- 20th Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4186
- Pub. Year:
- 2000
- Page(from):
- 890
- Page(to):
- 901
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438492 [0819438499]
- Language:
- English
- Call no.:
- P63600/4186
- Type:
- Conference Proceedings
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