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Development of a MoSi-based bilayer HT-PSM blank for ArF lithography

Author(s):
Kanai,S.
Kawada,S.
Isao,A.
Sasaki,T.
Maetoko,K.
Yoshioka,N.
1 more
Publication title:
20th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4186
Pub. Year:
2000
Page(from):
846
Page(to):
852
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438492 [0819438499]
Language:
English
Call no.:
P63600/4186
Type:
Conference Proceedings

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