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UV inspection of EUV and SCALPEL reticles

Author(s):
Pettibone,D.W.
Bareket,N.
Liang,T.
Stivers,A.R.
Hector,S.D.
Mangat,P.J.S.
Resnick,D.J.
Lercel,M.J.
Lawliss,M.
Magg,C.
Novembre,A.E.
Farrow,R.C.
7 more
Publication title:
20th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4186
Pub. date:
2000
Vol.:
4186
Page(from):
241
Page(to):
249
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438492 [0819438499]
Language:
English
Call no.:
P63600/4186
Type:
Conference Proceedings

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