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Advanced FIB mask repair technology for ArF lithography: ?

Author(s):
Kubo,S.
Hiruta,K.
Morimoto,H.
Yasaka,A.
Hagiwara,R.
Adachi,T.
Morikawa,Y.
Iwase,K.
Hayashi,N.
4 more
Publication title:
20th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4186
Pub. Year:
2000
Page(from):
158
Page(to):
164
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438492 [0819438499]
Language:
English
Call no.:
P63600/4186
Type:
Conference Proceedings

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