Blank Cover Image

Characterization of copper oxidation and reduction using spectroscopic ellipsometry

Author(s):
Powell,R.A.
Settles,D.
Lane,L.
Ygartua,C.L.
Srivatsa,A.R.
Hayzelden,C.
1 more
Publication title:
Process Control and Diagnostics
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4182
Pub. Year:
2000
Page(from):
97
Page(to):
105
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438430 [081943843X]
Language:
English
Call no.:
P63600/4182
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Spectroscopic Ellipsometry in Optical Coatings Manufacturing

J.N. Hilfiker, J.S. Hale, B.D. Johs, T.E. Tiwald, R.A. Synowicki, C.L. Bungay, J.A. Woollam

Society of Vacuum Coaters
7 Conference Proceedings In-Line Measurement of Epitaxial Silicon-Germanium Thin Films by Spectroscopic Ellipsometry

Liaw,H.M., Ygartua,C.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Optical characterization in the vacuum ultraviolet with variable angle spectroscopic ellipsometry:157 nm and below

Hilfiker,J.N., Singh,B., Synowicki,R.A., Bungay,C.L.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings In-Line Measurement of Epitaxial Silicon-Germanium Thin Films by Spectroscopic Ellipsometry

Liaw, H.M., Ygartua, C.

Electrochemical Society
3 Conference Proceedings Refractive index measurements of photoresist and antireflective coatings with variable-angle spectroscopic ellipsometry

Synowicki,R.A., Hilfiker,J.N., Dammel,R.R., Henderson,C.L.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings X-RAY CHARACTERIZATION OF BORON DELTA LAYERS IN Si AND SiGe

Powell, A.R., Kubiak, R.A., Whall, T.E., Parker, E.C.H., Bowen, D.K.

Materials Research Society
4 Conference Proceedings Recent Developments in Spectroscopic Ellipsometry for Materials and Process Control

J.N. Hilfiker, B. Johs, J. Hale, C.M. Herzinger, T.E. Tiwald, C.L. Bungay, R.A. Synowicki, G.K. Pribil, J.A. Woollam

Society of Vacuum Coaters
10 Conference Proceedings Review of Characterization of ZnO by Spectroscopic Ellipsometry

A. Bondaz, L. Kitzinger, C. Defranoux

Electrochemical Society
5 Conference Proceedings Application of spectroscopic ellipsometry to characterization of optical thin films (Invited Paper)

Woollam, J.A., Bungay, C.L., Yan, L., Thompson, D.W., Hilfiker, J.N.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Depth profile characterization of hydrogen implanted silicon using spectroscopic ellipsometry

Gubiotti, T., Jacy, D., Hoobler, R.J.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Monitoring optical properties and thickness of PECVD SiON antireflective layer by spectroscopic ellipsometry

Ygartua,C., Konjuh,K., Schuchmann,S., MacWilliams,K.P., Mordo,D.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Characterization of the Interfaces between SiC and Oxide Films by Spectroscopic Ellipsometry

Tomioka, Y., Iida, T., Midorikawa, M., Tukada, H., Yoshimoto, K., Hijikata, Y., Yaguchi, H., Yoshikawa, M., Ishida, Y., …

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12