Yield-limiting NMOSFET gate depletion in a deep submicrometer CMOS process
- Author(s):
Karnett,M.P. Qian,S. Mitchell,T. Subramaniam,V. Sur,H. Haby,B.J. Brugge,H.B. - Publication title:
- Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4181
- Pub. Year:
- 2000
- Page(from):
- 191
- Page(to):
- 199
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438423 [0819438421]
- Language:
- English
- Call no.:
- P63600/4181
- Type:
- Conference Proceedings
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