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Characterization of Kovar-Pyrex anodically bonded samples: a new packaging approach for MEMS devices

Author(s):
Publication title:
MEMS Reliability for Critical Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4180
Pub. Year:
2000
Page(from):
76
Page(to):
83
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438362 [0819438367]
Language:
English
Call no.:
P63600/4180
Type:
Conference Proceedings

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