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Failure analysis of tungsten-coated polysilicon micromachined microengines

Author(s):
Walraven,J.A.
Mani,S.S.
Fleming,J.G.
Headley,T.J.
Kotula,P.G.
Pimentel,A.A.
Rye,M.J.
Tanner,D.M.
Smith,N.F.
4 more
Publication title:
MEMS Reliability for Critical Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4180
Pub. Year:
2000
Page(from):
49
Page(to):
57
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438362 [0819438367]
Language:
English
Call no.:
P63600/4180
Type:
Conference Proceedings

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