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Electrostatic discharge/electrical overstress susceptibility in MEMS: a new failure mode

Author(s):
Walraven,J.A.
Soden,J.M.
Tanner,D.M.
Tangyunyong,P.
Cole Jr.,E.I.
Anderson,R.E.
Irwin,L.W.
2 more
Publication title:
MEMS Reliability for Critical Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4180
Pub. date:
2000
Vol.:
4180
Page(from):
30
Page(to):
39
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438362 [0819438367]
Language:
English
Call no.:
P63600/4180
Type:
Conference Proceedings

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