Micromirrors and micromirror arrays for scanning applicatoins
- Author(s):
Gessner,T. Kurth,S. Kaufmann,C. Markert,J. Ehrlich,A. Dotzel,W. - Publication title:
- MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4178
- Pub. Year:
- 2000
- Page(from):
- 338
- Page(to):
- 347
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438348 [0819438340]
- Language:
- English
- Call no.:
- P63600/4178
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
7
Conference Proceedings
Micromachined pressure gauge for the vacuum range based on damping of a resonator
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Novel Hadamard transform spectrometer realized using a dynamically driven micromirror array as a light modulator
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Synchronously working micromirrors for beam steering:design and application aspects
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |