Status of the development of a 128×128 microshutter array

Status of the development of a 128×128 microshutter array

Author(s):

Moseley,S.H.

Publication title:

MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4178

Pub. Year:

2000

Page(from):

51

Page(to):

58

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819438348 [0819438340]

Language:

English

Call no.:

P63600/4178

Type:

Conference Proceedings

Details

TDL ID:	ZA00011897
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : MOEMS and Miniaturized Systems
Conf. info. (Number):	2000
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2000.09.18-2000.09.20

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