Blank Cover Image

Deep cavity-shaped diaphragm for enhancement of microphone mechanical sensitivity

Author(s):
Publication title:
Micromachined Devices and Components VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4176
Pub. Year:
2000
Page(from):
59
Page(to):
66
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438324 [0819438324]
Language:
English
Call no.:
P63600/4176
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings High sensitivity capacitive MEMS microphone with spring supported diaphragm

N. Mohamad, P. Iovenitti, T. Vinay

Society of Photo-optical Instrumentation Engineers
7 Conference Proceedings New method for high-accuracy measurements of the internal transmittance in the deep-ultraviolet spectral region using prism-shaped samples

Neukirch, U., Li, X.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Response of a biologically inspired MEMS differential microphone diaphragm

Tan, L., Miles, R.N., Weinstein, M.G., Miller, R.A., Su, Q., Cui, W., Gao, J.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Choosing a Laser-Cutting Technology to be Applied to a Deep-Drawn Product

J. Grum, T. Kek

Trans Tech Publications
3 Conference Proceedings Design considerations in micromachined silicon microphones

Miao,J., Lin,R., Chen,L., Zou,Q., Lim,S.Y., Seah,S.H.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Simulation of the Packing of a Viscoelastic Melt a Complex-Shaped Cavity

Kumazawa H., Kamal R. M.

Society of Plastics Engineers, Inc. (SPE)
4 Conference Proceedings 1.3μm GalnNAs/GaAs multiple quantum wells resonant-cavity-enhanced photodetectors

Zhang, W., Pan, Z., Li, L., Zhang, R., Lin, Y., Wu, R.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Electrochemical Testing of Tantalum and Copper in Chemical Mechanical Polishing Slurries

Z. Lin, H. Li, R. Schmidt, R. Baker

Electrochemical Society
5 Conference Proceedings Mechanical Characterisation of Composite Sandwich to Steel Joint for Marine Structures

X.W. Li, P. Li, Z. Lin, H. Yu

Trans Tech Publications
11 Conference Proceedings Nanoparticles for Enhanced Sensitivity in Electrochemical Immunoassays

Y. Lin, J. Wang, H. Wang, H. Wu, Z. Tang

Electrochemical Society
6 Conference Proceedings Enhanced-accuracy GPS navigation using the interacting multiple-model estimator

Lin,X., Kirubarajan,T., Bar-Shalom,Y., Li,X.R.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings A novel capacitive type miniature microphone with a flexure hinge diaphragm [6374A-37]

Kim, H. J., Lee, S. Q., Park, K. H.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12