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High-force 10-kN piezoresistive silicon force sensor with output independent of force distribution

Author(s):
Zwijze,R.A.F.
Wiegerink,R.J.
Krijnen,G.J.M.
Berenschot,J.W.
Boer,M.J.de
Elwenspoek,M.C.
1 more
Publication title:
Micromachined Devices and Components VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4176
Pub. Year:
2000
Page(from):
47
Page(to):
58
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438324 [0819438324]
Language:
English
Call no.:
P63600/4176
Type:
Conference Proceedings

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