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Micromachined capacitive switches at microwave frequencies

Author(s):
Wong,C.H.
Tan,M.J.
Guo,L.H.
Huang,J.-M.
Liew,K.M.
Liu,A.Q.
1 more
Publication title:
Materials and Device Characterization in Micromachining III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4175
Pub. Year:
2000
Page(from):
140
Page(to):
148
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438317 [0819438316]
Language:
English
Call no.:
P63600/4175
Type:
Conference Proceedings

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