Blank Cover Image

Dynamic actuation behavior of NiTi/Si diaphragm micropump

Author(s):
Xu,D.
Wang,L.
Ding,G.
Zhou,Y.
Yu,A.
Cheng,X.
Chen,J.
Cai,B.
3 more
Publication title:
Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4174
Pub. Year:
2000
Page(from):
324
Page(to):
330
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438300 [0819438308]
Language:
English
Call no.:
P63600/4174
Type:
Conference Proceedings

Similar Items:

Wang, L., Chen, J., Xu, D., Cai, B.

SPIE-The International Society for Optical Engineering

H.L. Wu, X.Q. Zhao, J. Xu, C.G. Zhou, H.B. Xu

Trans Tech Publications

Cheng, X., Xu, D., Chen, J., Cai, B., Ding, G.

SPIE-The International Society for Optical Engineering

8 Conference Proceedings A Micromachined Diaphragm Micropump

Lin, Yu-Cheng, Hesketh, Peter J., Lunte, Susan M., Wilson, George S.

Electrochemical Society

Xu,D., Cai,B., Ding,G., Zhou,Y., Yu,A., Wang,L., Zhao,X.

SPIE - The International Society for Optical Engineering

D. Jiang, S.J. Li, G. Bao

Trans Tech Publications

Chen, J., Cai, B., Wang, L., Xu, D., Cheng, X.

SPIE-The International Society for Optical Engineering

Wang,L., Xu,D., Cai,B., Cheng,X.

SPIE-The International Society for Optical Engineering

Yuan, Z., Cheng, X., Xu, D., Ye, Z., Zhang, Y., Cai, B.

SPIE - The International Society of Optical Engineering

Xu, L. -Y., Wang, Q. -X., Xu, Y. -D., Huang, J. -S., Cai, G. -Y., Chen, G. -Q.

Elsevier

6 Conference Proceedings Surface relief of TiNiCu thin films

Cheng, X., Xu, D., Cai, B., Wang, L., Chen, J., Li, G., Xu, S.

SPIE-The International Society for Optical Engineering

12 Conference Proceedings LD-pumped Q-CW Nd:YAG/KTP red laser

Wen, W., Ding, X., Cai, Z., Zhou, J., Zou, L., Zhu, M., Yu, Y., Wang, P., Yao, J.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12