HARM processing techniques for MEMS and MOEMS devices using bonded SOI substrates and DRIE
- Author(s):
- Publication title:
- Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4174
- Pub. Year:
- 2000
- Page(from):
- 98
- Page(to):
- 110
- Pages:
- 13
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438300 [0819438308]
- Language:
- English
- Call no.:
- P63600/4174
- Type:
- Conference Proceedings
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