Large-area MEMS fabrication with thick SU-8 photoresist applied to an x-ray image sensor array
- Author(s):
Daniel,J.H. Krusor,B.S. Apte,R.B. Street,R.A. Goredema,A. McCalium,J. Boils-Boissier,D.C. Kazmaier,P.M. - Publication title:
- Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4174
- Pub. Year:
- 2000
- Page(from):
- 40
- Page(to):
- 48
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438300 [0819438308]
- Language:
- English
- Call no.:
- P63600/4174
- Type:
- Conference Proceedings
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