Blank Cover Image

Large-area MEMS fabrication with thick SU-8 photoresist applied to an x-ray image sensor array

Author(s):
Daniel,J.H.
Krusor,B.S.
Apte,R.B.
Street,R.A.
Goredema,A.
McCalium,J.
Boils-Boissier,D.C.
Kazmaier,P.M.
3 more
Publication title:
Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4174
Pub. Year:
2000
Page(from):
40
Page(to):
48
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438300 [0819438308]
Language:
English
Call no.:
P63600/4174
Type:
Conference Proceedings

Similar Items:

Daniel, J.H., Krusor, B., Lau, R., Lu, J.P., Wang, Y., Mulato, M., Apte, R.B., Street, R.A., Goredema, A., …

Materials Research Society

Street,R.A., Shah,K.S., Ready,S.E., Apte,R.B., Bennett,P.R., Klugerman,M., Dmitriyev,Yu.

SPIE-The International Society for Optical Engineering

Daniel, J.H., Krusor, B.S., Chopra, N., Street, R.A., Kazmaier, P.M., Ready, S.E., Ho, J.H.

Materials Research Society

Knipp, D., Murti, D.K., Krusor, B., Apte, R., Jiang, L., Lu, J.P., Ong, B.S., Street, R.A.

Materials Research Society

Knipp,D., Street,R.A., Krusor,B.S., Apte,R.B., Ho,J.

SPIE-The International Society for Optical Engineering

9 Conference Proceedings Matrix-addressed x-ray detector arrays

Street,R.A., Apte,R.B., Boyce,J.B., Ho,J., Lau,R., Lemmi,F., Lu,J.-P., Mulato,M., Ready,S.E., Schuylenbergh,K.Van

SPIE-The International Society for Optical Engineering

Knipp, D., Street, R.A., Krusor, B., Ho, J., Apte, R.B.

Materials Research Society

Weisfield,R.L., Street,R.A., Apte,R.B., Moore,A.

SPIE-The International Society for Optical Engineering

J. Daniel, A.C. Arias, B. Krusor, R. Lujan, R. Street

Electrochemical Society

Weisfield,R.L., Hartney,M.A., dpiX, Street,R.A., Apte,R.B.

SPIE-The International Society for Optical Engineering

Apte,R.B., Street,R.A., Ready,S.E., Jared,D.A., Moore,A.M., Weisfield,R.L., Rodericks,T.A., Granberg,T.A.

SPIE-The International Society for Optical Engineering

Street, R.A., Fujieda, I., Weisfield, R., Nelson, S., Nylen, P.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12