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Long-term test and characterization of optical components at 193 nm and 157 nm

Author(s):
Vogler,K.
Klaft,I.
Schroder,T.
Stamm,U.
Mann,K.R.
Apel,O.
Gorling,C.
Leinhos,U.
3 more
Publication title:
Inorganic optical materials II : 1-3 August, 2000, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4102
Pub. Year:
2000
Page(from):
255
Page(to):
260
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437471 [0819437476]
Language:
English
Call no.:
P63600/4102
Type:
Conference Proceedings

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