Long-term test and characterization of optical components at 193 nm and 157 nm
- Author(s):
Vogler,K. Klaft,I. Schroder,T. Stamm,U. Mann,K.R. Apel,O. Gorling,C. Leinhos,U. - Publication title:
- Inorganic optical materials II : 1-3 August, 2000, San Diego, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4102
- Pub. Year:
- 2000
- Page(from):
- 255
- Page(to):
- 260
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437471 [0819437476]
- Language:
- English
- Call no.:
- P63600/4102
- Type:
- Conference Proceedings
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