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Calibration tool for a CCD-camera-based vision system

Author(s):
Xu,G.
Tan,S.L.
Low,S.P.
Heng,Y.S.
Lai,W.C.
Du,X.
1 more
Publication title:
Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4099
Pub. Year:
2000
Page(from):
154
Page(to):
165
Pages:
12
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437440 [0819437441]
Language:
English
Call no.:
P63600/4099
Type:
Conference Proceedings

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