Blank Cover Image

Optical microscopy at sub-0.1-μm resolution for semiconductor applications

Author(s):
Vollrath,W.  
Publication title:
Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4099
Pub. date:
2000
Vol.:
4099
Page(from):
23
Page(to):
30
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437440 [0819437441]
Language:
English
Call no.:
P63600/4099
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Ultra-high-resolution DUV microscope optics for semiconductor applications [5865-14]

Vollrath, W.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Super Self-Aligned Processing for Sub 0.1 μm MOS Devices Using Selective Si l-xGexCVD

Kikuchi, T., Yamashiro, T., Moriya, A., Noda, T., Yamamoto, Y., Deng, C., Sakuraba, M., Matsuura, T., Murota, J.

Electrochemical Society
2 Conference Proceedings Sub-0.1μm optical track width measurement [5858-22]

Smith, R. J., See, C. W., Somekh, M. G., Yacoot, A.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Synthesis and Characterization of LaCr1-xSnxO3 Nanopowders (x = 0 and 0.1)

A.C.S. Costa, A.P.S. Peres, A.C. Lima, C.P. Bergmann, W. Acchar

Trans Tech Publications
3 Conference Proceedings Doping Process Issues for Sub-0.1 μm Generation MOSFETs

Sugii, Toshihiro, Pidin, Sergey, Momiyama, Youichi, Goto, Ken-ichi, Tanaka, Takuji, Yamamoto, Tomonari, Futatugi, …

Materials Research Society
9 Conference Proceedings CMP Applications for Sub-0.25μm Process Technologies

Pramanik, D., Weling, M., Lin, X.-W.

Electrochemical Society
4 Conference Proceedings Fabrication And Performance Limits Of Sub-0.1 μm Cu Interconnects

Kuan, T., Inoki, C., Oehrlein, G., Rose, K., Zhao, Y., Wang, G., Rossnagel, S., Cabral, C.

Materials Research Society
10 Conference Proceedings Effects of the Silicon Nitride Passivation on the DC and RF Performance of 0.1μm Pseudomorphic pHEMTs

Oh, J-H., Sul, W-S., Han, H-J., Son, M-S., Rhee, J.-K., Kim, S-D.

Electrochemical Society
5 Conference Proceedings Short channel effects in sub 0.1 μm SOI-MOSFETs

Rauly, E., Balestra, F.

Electrochemical Society
11 Conference Proceedings Application of full-chip level optical proximity correction to memory device with sub-0.10-μm design rule and ArF lithography

Yune,H.-S., Kim,H.-B., Kim,W.-H., Ahn,C.-N., Ham,Y.-M., Shin,K.-S.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Cleaning for Sub 0.1 μm Technology: A Particular Challenge*

Knotter, D.M.

Electrochemical Society
12 Conference Proceedings Low Temperature Crystal Growth and Characterization of Cd0.9Zn0.1Te for Radiation Detection Applications

Ramesh M. Krishna, Timothy C. Hayes, Peter G. Muzykov, Krishna C. Mandal

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12