Blank Cover Image

Optical microscopy at sub-0.1-μm resolution for semiconductor applications

Author(s):
Vollrath,W.  
Publication title:
Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4099
Pub. date:
2000
Vol.:
4099
Page(from):
23
Page(to):
30
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437440 [0819437441]
Language:
English
Call no.:
P63600/4099
Type:
Conference Proceedings

Similar Items:

Vollrath, W.

SPIE - The International Society of Optical Engineering

Kikuchi, T., Yamashiro, T., Moriya, A., Noda, T., Yamamoto, Y., Deng, C., Sakuraba, M., Matsuura, T., Murota, J.

Electrochemical Society

Smith, R. J., See, C. W., Somekh, M. G., Yacoot, A.

SPIE - The International Society of Optical Engineering

A.C.S. Costa, A.P.S. Peres, A.C. Lima, C.P. Bergmann, W. Acchar

Trans Tech Publications

Sugii, Toshihiro, Pidin, Sergey, Momiyama, Youichi, Goto, Ken-ichi, Tanaka, Takuji, Yamamoto, Tomonari, Futatugi, …

Materials Research Society

Pramanik, D., Weling, M., Lin, X.-W.

Electrochemical Society

Kuan, T., Inoki, C., Oehrlein, G., Rose, K., Zhao, Y., Wang, G., Rossnagel, S., Cabral, C.

Materials Research Society

Oh, J-H., Sul, W-S., Han, H-J., Son, M-S., Rhee, J.-K., Kim, S-D.

Electrochemical Society

Rauly, E., Balestra, F.

Electrochemical Society

Yune,H.-S., Kim,H.-B., Kim,W.-H., Ahn,C.-N., Ham,Y.-M., Shin,K.-S.

SPIE-The International Society for Optical Engineering

Knotter, D.M.

Electrochemical Society

Ramesh M. Krishna, Timothy C. Hayes, Peter G. Muzykov, Krishna C. Mandal

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12