In-situ annealing during the growth of relaxed SiGe
- Author(s):
Li,D. Huang,C. Cheng,B. Wang,H. Yu,Z. Zhang,C. Yu,J. Wang,Q. - Publication title:
- Optical and infrared thin films : 1 August 2000, San Diego, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4094
- Pub. Year:
- 2000
- Page(from):
- 93
- Page(to):
- 99
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437396 [0819437395]
- Language:
- English
- Call no.:
- P63600/4094
- Type:
- Conference Proceedings
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