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In-situ annealing during the growth of relaxed SiGe

Author(s):
Li,D.
Huang,C.
Cheng,B.
Wang,H.
Yu,Z.
Zhang,C.
Yu,J.
Wang,Q.
3 more
Publication title:
Optical and infrared thin films : 1 August 2000, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4094
Pub. Year:
2000
Page(from):
93
Page(to):
99
Pages:
7
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437396 [0819437395]
Language:
English
Call no.:
P63600/4094
Type:
Conference Proceedings

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