Laser processing of convex structures in chalcogenide glasses
- Author(s):
- Publication title:
- First International Symposium on Laser Precision Microfabrication : 14-16 June 2000, Omiya, Saitama, Japan
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4088
- Pub. Year:
- 2000
- Page(from):
- 351
- Page(to):
- 354
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437310 [081943731X]
- Language:
- English
- Call no.:
- P63600/4088
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Photo-induced phenomena in chalcogenide glasses: subgap photon effects (Plenary Paper)
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
3
Conference Proceedings
Waveguides in chalcogenide glasses produced by a train of femtosecond laser pulses
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Development of a next-generation e-beam lithography system for 1-Gb DRAM masks
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Development of an e-beam lithography system for 100- to 90-nm node reticles
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Structure and Mechanical Properties of Severely Deformed Cu-Cr-Zr Alloys Produced by Accumulative Roll-Bonding Process
Trans Tech Publications |
12
Conference Proceedings
High-alignment-accuracy EB writing of phase shift image for 65-nm node masks
SPIE - The International Society of Optical Engineering |