Excimer laser microfabrication and micromachining
- Author(s):
- Gower,M.C.
- Publication title:
- First International Symposium on Laser Precision Microfabrication : 14-16 June 2000, Omiya, Saitama, Japan
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4088
- Pub. Year:
- 2000
- Page(from):
- 124
- Page(to):
- 131
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437310 [081943731X]
- Language:
- English
- Call no.:
- P63600/4088
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Laser microfabrication in industry - perspectives from the past, present and future
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
New developments and applications in the production of 3D microstructures by laser micromachining
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Industrial applications of pulsed lasers to materials microprocessing (Invited Paper)
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Manufacture of miniature bioparticle electromanipulators by excimer laser ablation
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |