Triangulation-based sensor for noncontact micro-and nanotopographic surface inspection

Triangulation-based sensor for noncontact micro-and nanotopographic surface inspection

Author(s):: Costa,M.F.M.
Publication title:: Applications of photonic technology 4 : closing the gap between theory, development, and application : Photonics North 2000
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 4087
Pub. Year:: 2000
Page(from):: 1214
Page(to):: 1221
Pages:: 8
Pub. info.:: Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819437303 [0819437301]
Language:: English
Call no.:: P63600/4087
Type:: Conference Proceedings

Details

TDL ID:	ZA00011825
Series ID:	PA00000029
Conf. info. (Name):	ICAPT : International Conference on Applications of Photonic Technology
Conf. info. (Number):	2000 : 4th
Conf. info. (Venue):	Quebec City, Canada
Conf. info. (Date):	2000.06.12-2000.06.16

Similar Items:

1 Conference Proceedings Noninvasive microtomographic inspection of rough surfaces by active triangulation Costa,M.F.M. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Optical microtopographic inspection of thermoplastic rubber Costa,M.F.M. SPIE - The International Society for Optical Engineering
2 Conference Proceedings Optical triangulation for the microtopographic inspection of rough surfaces Costa,M.F.M. SPIE - The International Society for Optical Engineering	8 Conference Proceedings Microtopographic inspection of Cr-Cr2O3 cermet solar absorbers Costa,M.F.M., Teixeira,V., Nunes,C.M. SPIE - The International Society for Optical Engineering
3 Conference Proceedings Dimensional inspection of rigid gas-permeable contact lenses by laser triangulation Costa,M.F.M. SPIE - The International Society for Optical Engineering	9 Conference Proceedings Thin films residual stress measurement by optical profilometry Costa, M.F.M. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Thickness and topographic inspection of RPG contact lenses by optical triangulation Costa,M.F.M. SPIE-The International Society for Optical Engineering	10 Conference Proceedings New trends in light and optics teaching: building bridges to the information society-the OPTICA XXI project (Invited Paper) Costa, M.F.M. SPIE-The International Society for Optical Engineering
5 Conference Proceedings The Choice of the Photo-Sensitive Detection Systems for Use in Triangulation Based Optical Microtopographers, Costa,M.F.M. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Automated analysis of electrophoretic gels by digital image processing Costa,M.F.M. SPIE - The International Society for Optical Engineering
6 Conference Proceedings Use of CCD arrays versus PSD detectors in an optical triangulation-based microtopographer Costa,M.F.M. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Improving Contact Lens' Fitting Evaluation by Digital Image Acquisition and Processing, Costa,M.F.M. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12