PMMA deep etching by O2RIE
- Author(s):
Yu,A. Ding,G. Guo,X. Li,C. Mao,H. Ni,Z. - Publication title:
- Fourth International Conference on Thin Film Physics and Applications : 8-11 May 2000, Shanghai, China : proceedings
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4086
- Pub. Year:
- 2000
- Page(from):
- 852
- Page(to):
- 855
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437297 [0819437298]
- Language:
- English
- Call no.:
- P63600/4086
- Type:
- Conference Proceedings
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