Bias voltage dependence of sp3 fractions of amorphous carbon films prepared by magnetically filtered carbon ion deposition studied by spectroscopic ellipsometry

Bias voltage dependence of sp3 fractions of amorphous carbon films prepared by magnetically filtered carbon ion deposition studied by spectroscopic ellipsometry

Author(s):: Guo,W.
Publication title:: Fourth International Conference on Thin Film Physics and Applications : 8-11 May 2000, Shanghai, China : proceedings
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 4086
Pub. Year:: 2000
Page(from):: 590
Page(to):: 594
Pages:: 5
Pub. info.:: Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819437297 [0819437298]
Language:: English
Call no.:: P63600/4086
Type:: Conference Proceedings

Details

TDL ID:	ZA00011824
Series ID:	PA00000029
Conf. info. (Name):	International Conference on Thin Film Physics and Applications
Conf. info. (Number):	2000 : 4th
Conf. info. (Venue):	Shanghai, China
Conf. info. (Date):	2000.05.08-2000.05.11

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