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Transport and Reaction in Inductively Coupled Plasmas for Microelectronics

Author(s):
Publication title:
Electron Kinetics and applications of glow discharges
Title of ser.:
NATO ASI series. Series B, Physics
Ser. no.:
367
Pub. date:
1998
Page(from):
367
Page(to):
390
Pages:
24
Pub. info.:
New York: Lenum Press
ISBN:
9780306458224 [0306458225]
Language:
English
Call no.:
N11479/367
Type:
Conference Proceedings

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